Development of a Gas-Fed Plasma Source for Pulsed High-Density Plasma/Material Interaction Studies
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Transactions on Plasma Science
سال: 2014
ISSN: 0093-3813,1939-9375
DOI: 10.1109/tps.2014.2344974